EBARA TURBO VACUUM PUMPS: ET 450 WS,ET 600 WS,ET 1301 WS,ET 1600 WS,ET 2500 WS,ET 3300 WS- Sales and Service of NEW and Refurbished Turbo Vacuum Pumps & Controllers.
Please contact us for a complete quote. 1-408-607-4135 or vacuumspecial@netscape.net Prices and availability subject to change without notice.
ET-H and ET- WS Series
The EBARA ET-H Series consists of our high compression turbo pumps. Choose from the list below for more information about individual pump models.
EBARA's turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum for today's high technology environments. The ET Series features a five axis magnetic bearing and tuning free half rack controllers. The ET Series offers two major types of turbomolecular pumps, high compression, ET-H Series, and a wide range corrosion resistant, ET-WS Series. The ET-WS Series also offers a temperature- controlled model, ET-WS (-A), turbo for etching applications. EBARA also features the Cryo-Turbo model, ET-K Series, which combines a cold head to the ET Series for increased water pumping.
The ET Series controllers are19" half rack, tuning free controllers that require no battery back up. If power fails rotational energy generates electric power to support the rotor. Pump and controllers have interchangeability for the same models. Easy monitoring by LCD displays running conditions, rotation speed, running hours, and operating status (alarm trips).
EBARA's high compression ratio type turbomolecular ET-H Series features the five-axis magnetic bearing and high compression ratio performance giving a clean ultrahigh vacuum environment. The ET-H Series provides a range of turbo pumps with pumping speed of N2 from 300 –1600 L/s and H2 compression ratios >106 .
EBARA's Wide-Range Type Turbomolecular Pump ET-W Series features the five-axis magnetic bearing and wide pressure range giving a clean vacuum environment. The ET-W Series has a large allowable backpressure (max. 3 Torr) enables simplification of foreline exhaust system. Anticorrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals. ET-W Series provides a range of turbo pumps with pumping speed of N2 from 300 –1600 L/s.
EBARA's Cryo-Turbo Type Pump ET-K Series is a complete oil free pump that features the five axis magnetic bearing. The installation of a Cold Panel collects moisture in the suction port, eliminating the drawbacks of conventional ultrahigh vacuum pumps. The ET-K Series features high water molecule exhaust capacity and high-speed exhaust up to ulltrahigh vacuum. ET-K Series provides a pumping speed of H2O speed of 1,700 and 3,200 L/s.
We are a leading supplier of vacuum pumps (new and refurbished),Vacuum pumps, turbo pumps and controllers (frequency converters),High Vacuum Pumps (ion,turbo,diffusion,cryo,mechanical,dry,scroll,rotary vane),Leak Detectors and vacuum equipment for the semiconductor and high vacuum related industries.
We have large stock of new vacuum product and supplies and in most cases items are shipped the same day as ordered.
Our wide acces to used vacuum equipment and rebuilding services provides an additional excellent resource for low-cost solutions.
Please contact us for a complete quote. 1-408-607-4135 - Fax:408-445-8589 ,email: vacuumspecial@netscape.net Prices and availability subject to change without notice.
